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  • C, H, N AND O IN SI AND CHARACTERIZATION AND SIMULATION OF MATERIALS AND PROCESSES
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    C, H, N AND O IN SI AND CHARACTERIZATION AND SIMULATION OF MATERIALS AND PROCESSES
    BORGHESI, A. / GÖSELE, U.M. / VANHELLEMONT, J. / GUÉ, A.M. / DJAFARI-ROUHANI, M.
    Containing over 200 papers, this volume contains the proceedings of two symposia in the E-MRS series. Part I presents a state of the art review of the topic - Carbon, Hydrogen, Nitrogen and Oxygen in Silicon and in Other Elemental Semiconductors. There was strong representation from the industrial laboratories, illustrating that the topic is highly relevant for the semiconducto...

    $3,649.00

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