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  • MICROLITHOGRAPHY
    ebook
    MICROLITHOGRAPHY
    BRUCE W. SMITH / KAZUAKI SUZUKI
    The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithography. The book is divided into chapters covering all important aspects related to the imaging, materials, and processes that have been nece...

    $1,380.00

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