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  • SCIENCE AND TECHNOLOGY OF DEFECTS IN SILICON
    ebook
    SCIENCE AND TECHNOLOGY OF DEFECTS IN SILICON
    AMMERLAAN, C.A.J. / CHANTRE, A. / WAGNER, P.
    This volume reviews recent developments in the materials science of silicon. The topics discussed range from the fundamental characterization of the physical properties to the assessment of materials for device applications, and include: crystal growth; process-induced defects; topography; hydrogenation of silicon; impurities; and complexes and interactions between impurities.I...

    $928.00

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