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  • RAPID THERMAL PROCESSING: SCIENCE AND TECHNOLOGY
    ebook
    RAPID THERMAL PROCESSING: SCIENCE AND TECHNOLOGY
    FAIR, RICHARD B.
    This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also pr...

    $928.00

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