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  • HANDBOOK OF VLSI MICROLITHOGRAPHY: PRINCIPLES, TECHNOLOGY AND APPLICATIONS
    ebook
    HANDBOOK OF VLSI MICROLITHOGRAPHY: PRINCIPLES, TECHNOLOGY AND APPLICATIONS
    GLENDINNING, WILLIAM B. / HELBERT, JOHN N.
    This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip product...

    $928.00

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