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  • DIRECTED SELF-ASSEMBLY OF BLOCK CO-POLYMERS FOR NANO-MANUFACTURING
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    DIRECTED SELF-ASSEMBLY OF BLOCK CO-POLYMERS FOR NANO-MANUFACTURING
    GRONHEID, ROEL / NEALEY, PAUL
    The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed ...

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