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  CHEMISTRY FOR ELECTRONIC MATERIALS

  JENSEN, K.F. / HIRAI, T. / WAHL, G. / PAULEAU, YVES

  The chemical aspects of materials processing used for electronic applications, e.g. Si, III-V compounds, superconductors, metallization materials, are covered in this volume. Significant recent advances have occurred in the development of new volatile precursors for the fabrication of III-V semiconductor and metal [Cu, W] films by OMCVD. Some fundamentally new and wide-ranging ...

  $928.00

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