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  • HANDBOOK OF SEMICONDUCTOR SILICON TECHNOLOGY
    ebook
    HANDBOOK OF SEMICONDUCTOR SILICON TECHNOLOGY
    O'MARA, WILLIAM C. / HERRING, ROBERT B. / HUNT, LEE P.
    This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth.Fundamentals in the areas of silicon precurso...

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