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  • HANDBOOK OF SILICON WAFER CLEANING TECHNOLOGY
    ebook
    HANDBOOK OF SILICON WAFER CLEANING TECHNOLOGY
    KAREN REINHARDT
    The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with respect to other manufacturing steps such as thermal, implant, etching, and pho...

    $3,921.00

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