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  • ANALYSIS AND DESIGN PRINCIPLES OF MEMS DEVICES
    ebook
    ANALYSIS AND DESIGN PRINCIPLES OF MEMS DEVICES
    MINHANG BAO
    Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is...

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