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  • HANDBOOK OF SILICON BASED MEMS MATERIALS AND TECHNOLOGIES
    ebook
    HANDBOOK OF SILICON BASED MEMS MATERIALS AND TECHNOLOGIES
    LINDROOS, VEIKKO / MOTOOKA, TERUAKI / FRANSSILA, SAMI / PAULASTO-KROCKEL, MERVI / TILLI, MARKKU / AIRAKSI
    The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), mater...

    $3,656.00

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