HANDBOOK OF PLASMA PROCESSING TECHNOLOGY: FUNDAMENTAL, ETCHING, DEPOSITION AND SURFACE INTERACTIONS
ebook

HANDBOOK OF PLASMA PROCESSING TECHNOLOGY: FUNDAMENTAL, ETCHING, DEPOSITION AND SURFACE INTERACTIONS (ebook)

ROSSNAGEL, STEPHEN M. / WESTWOOD, WILLIAM D. / CUOMO, JEROME J.

$1,907.00
IVA incluido
Editorial:
WILLIAM ANDREW PUBLISHING
Materia
ELECTRONICA
ISBN:
9780815517641
Páginas:
546
Formato:
PDF
Idioma:
Inglés
DRM
Si

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.