WASA, KIYOTAKA / HAYAKAWA, SHIGERU
A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade.
Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.
