PLASMA ELECTRONICS
ebook

PLASMA ELECTRONICS (ebook)

TOSHIAKI MAKABE / ZORAN LJ. PETROVIC

$2,320.00
IVA incluido
Editorial:
CRC PRESS
Materia
ELECTRONICA
ISBN:
9781040220405
Formato:
Epublication content package
Idioma:
Inglés
DRM
Si

Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental

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    TOSHIAKI MAKABE / ZORAN LJ. PETROVIĆ
    More than two decades have passed since the first edition of Plasma Electronics was published. Today, we are entering an era that demands increasingly sophisticated control and design of plasma sources and related surface technologies for micro- and nano-electronic device fabrication. Plasma technology, based on surface interactions, continues to expand into emerging fields inc...

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