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  ebook

  HANDBOOK OF PLASMA PROCESSING TECHNOLOGY: FUNDAMENTAL, ETCHING, DEPOSITION AND SURFACE INTERACTIONS

  ROSSNAGEL, STEPHEN M. / WESTWOOD, WILLIAM D. / CUOMO, JEROME J.

  This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors. ...

  $1,907.00

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